Handbook of Thin Film Process Technology
135 pages2017Taylor & Francis GroupISBN 9781315893693
About this book
The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume presents additional recipe-type information (i.e. important deposition system details and process parameters) for optical materials.
Publication Details
- Publisher
- Taylor & Francis Group
- Published
- 2017
- Pages
- 135
- ISBN
- 9781315893693
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