Thin-Film Deposition

Presents the basic principles underlying various thin-film vapor-phase deposition techniques and explains evolving thin-film topics including oil-free vacuum, microstructure control, lattice-matched heteroepitaxy, and microanalysis. Offers advice for selecting the best technique for a specific application, predicting deposition process behavior, and solving production problems. Includes bandw diagrams and photos, and reference material on units, characteristics of the elements, and sonic orifice flow. For engineers and technicians. Annotation copyright by Book News, Inc., Portland, OR